You won't get a CEL unless the car runs for a certain amount of time. I have done the stupid and started without the MAF plujgged in and didn't get a CEL.
Your MAF is a wire filament type and it may have been damaged a bit prior to cleaning and the apray just finished it off. Take it off and look at the filaments. See if they are broken, if so, then it will have to be replaced.
My thinking is, if it was running before the cleaning, then something broke. You have already checked all of the hoses, so that is not the problem and your only other possibility is the MAF itself.
I have a couple of them laying around, so let me know if you need one.
Mike